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| Categories | Lab Test Machine |
|---|---|
| Type: | Testing Machine |
| Accuracy Class: | High Accuracy |
| Accuracy: | / |
| Brand Name: | LONROY |
| Place of Origin: | Guangdong, China |
| Application: | Auto Testing |
| customized support: | OEM, ODM, OBM |
| power: | -- |
| Protection Class: | Ip56 |
| Voltage: | 220 V |
| warranty: | 1 Year |
| Wavelength Range: | 250 nm to 1700 nm |
| Spot Size: | 1 mm to 5 mm (variable) |
| Sample Size: | Up to 200 mm in diameter |
| Measurement Time: | Approximately 1 second per position point |
| MOQ: | 1 |
| Company Info. |
| DONGGUAN LONROY EQUIPMENT CO LTD |
| Verified Supplier |
| View Contact Details |
| Product List |
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
I. Overview
LR-SE-M is a dedicated spectroscopic ellipsometer customized for the semiconductor industry for micro-area pattern structure measurement. It adopts 1. ultra-miniature light spot detection measurement technology and 2. customized ultra-fast measurement speed technology. It can be applied to the measurement of n/k/d of anti-reflection films, conductive films and other thin films on various transparent substrates, and is perfectly suitable for the optical parameter analysis of various micro-area patterns.
II. Special Features
1. The spot size can be customized, with the minimum reaching 30um.
2. Ultra-fast measurement, with a single measurement time of less than 0.5 seconds;
3. The series configuration is flexible and supports customized functional design.
4. Compact structure, more suitable for online integrated measurement.
III. Measurement Examples
Microstructure measurement of captured area in the image

Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Technical Specification
Wavelength Range | 250 nm to 1700 nm |
Spot Size | 1 mm to 5 mm (variable) |
Sample Size | Up to 200 mm in diameter |
Measurement Thickness Range* | ~30 μM |
Measurement Time | Approximately 1 second per position point |
Incident Angle Range | 20° to 90° (5-degree intervals) |
Repeatability Error* | Less than 1 Å (angstrom) |


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