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High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

Categories Linear Servo Motor
Brand Name: SUPT
Model Number: A Series
Certification: 3C, CE, ISO9001
Place of Origin: Jiangsu, China
MOQ: ≥1
Price: $150.00/pieces >=1 pieces
Payment Terms: T/T
Supply Ability: To be negotiated
Delivery Time: 1-5pcs ,5 days . >20pcs ,To be negotiated
Packaging Details: in carton and as customer requirements
small linear motor
Warranty: 3months-1year
Usage: BOAT, Car, Electric Bicycle, UAV, robot, Medical ventilator, microscope, endoscope, optics, optical lens
Type: Micro Motor
Torque: Requests
Construction: Permanent Magnet
Protect Feature: Totally Enclosed
Speed(RPM): High Speed
Continuous Current(A): Current
Efficiency: IE 1
Product Name: Linear Actuator
Application: Automatic Product
Motor type: Permanent Motor
Keywords: Small Linear Motor
Name: A Series Motor
Rated Voltage: 1.2-12V
Size: 30mm
Color: Silver
Item: Mini Electric Motors
Packing: in carton
Port: Shanghai Port
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  • Product Details
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High Frequency Miniature Ultra Thin Linear Motor For Wafer Control

Product Description:

The linear motor's armature consists solely of coils without magnets, eliminating magnetic attraction between moving and stationary parts. This design prevents cogging effects, ensuring smooth operation. Its lightweight construction enables high-speed and high-acceleration performance. The thrust characteristics are smooth, achieving high precision when paired with linear encoders. The stroke can be extended arbitrarily, operating silently and maintenance-free. Features imported epoxy resin vacuum-filled at high temperature and pressure, along with highly flexible power cables. Widely applied in semiconductor manufacturing equipment, precision testing equipment for the flat-panel display industry, laser cutting/marking machines, and machine vision inspection systems. Modular design allows for custom machining.
Linear motor technology is the core driver advancing semiconductor manufacturing equipment, serving as the essential direct drive for achieving precise wafer positioning and high-speed motion.
Leveraging its high precision, speed, acceleration, and smooth motion characteristics, the linear motor enables precise wafer extraction from cassettes within wafer transfer systems, high-accuracy placement onto processing stations, and rapid return of wafers to cassettes post-processing.
Within precision positioning platforms, linear motors support and precisely position wafers. Wafer carriers must perform nanometer-level stepping and scanning movements within the XY plane to complete exposure. In microscopes and defect detection equipment, wafers must also be accurately moved beneath inspection probes.

Product Parameters:

Linear motor performance parameters
A Series--MLCA(Dynamic) MLFA(Stator)
Model/ParMLCA-0020-075-00MLCA-0040-135-00MLCA-0080-255-00
Peak force(Fp)N60120240
Peak current(lp)Amps4.84.24.2
Continuous force(Fc)N204080
Continuous current(lc)Amps1.61.41.4
Actuator constants(DC motor conversion/3p)(Ka)N/W5.657.911.2
Constant Thrust(L-L)(Kf)N/Amps15.330.460.3
Back EMF constant(L-L)(Kb)V/m/sec8.817.634.8
Electrical constant(Te)ms0.30.30.3
Resistance(L-L)(R)@25℃Ω4.89.419.2
Inductance(L-L)(l)mh1.5136
Heat transfer coefficient(Rth)℃/W*3.9*1.9**1.3
Coil maximum temperature(Tmax)120120120
Magnet Pole pitch(2T)mm303030
Mover weightKg0.240.420.82



Detailed Images

Certifications
Our Company
Suzhou Unite Precision Technology Co,Ltd.(SUPT Motion)is an engineering and manufacturing company dedicated to providing Voice Coil Actuator linear motor and linear motor platform,SUPT Motion is to provide both a standard distribution product and also madium and high volume custom OEM solutions.The primary product is voice coil based linear and rotary actuator and brushless permantent magnet type linear motor.
The company has strong R&D capability perfect after sale service system.SUPT Motion is able to according to customer specific requirements design and produce voice coil motor linear motor and all kinds of linear motion platform.With many years of experience,our international engineering and manufacturing staff is able to provide the most advanced technology and best quality product for the Asia,North America,Europe and the world varios areas of voice coil motor and linear motor customers and dealers.
The company is able to provide cost effective solution to you large OEM production requirement for you by being based in the manufacturing centers of Suzhou,we will continue to improve in technology strive for perfection in the quality.Adhering to the tenet of SUPT Motion Hight quality is our pursult,Customer satisfaction is our commitment.With our strict quality deparment and production deparment ensure that our high quality and inexpensive products motor more cost-effective to serve customers make it has strong competitiveness.

Linear Motors Compared to Traditional Rotating Motors:

CharacteristicsLinear MotorTraditional Transmission Methods (Screw/Belt)
High PrecisionDirect drive with no intermediate transmission components eliminates backlash and backlash error, enabling nanometer level positioning accuracy.Backlash, elastic deformation, and friction exist, limiting precision typically to the micrometer level.
High Speed and
Acceleration
Reaches speeds of several
meters per second and
accelerations exceeding 10G,
significantly boosting equipment
throughput.
Limited by screw rotational,speed and inertia, resulting in lower speed and acceleration.
High SmoothnessSmooth motion with non-contact
transmission and minimal
vibration. Critical for
vibration-sensitive processes
like lithography.
Contact friction within the transmission
chain can generate vibration and noise.
High CleanlinessLubrication-free operation
eliminates grease or wear
particles, meeting the ultra-
high cleanliness requirements
of semiconductor manufacturing.
Lubrication is required, posing a
contamination risk.
High Reliability
and Long Service
Life
Primary and moving parts (magnetic
track and coil) have no mechanical
contact, resulting in minimal wear
and extended lifespan.
Multiple mechanical contact points are
subject to wear, requiring regular
maintenance.
Vacuum CompatibilityEasily designed for vacuum-
compatible models, making it ideal
for vacuum process equipment.
Lubrication and heat dissipation pose
significant challenges in vacuum environments.
Quality High Frequency Miniature Ultra Thin Linear Motor For Wafer Control for sale
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