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Wafer-Level Atomic Force Microscoperoscope

Categories Atomic Force Microscope
Brand Name: Truth Instruments
Model Number: AtomEdge Pro
Place of Origin: CHINA
MOQ: 1
Price: Price Negotiable | Contact us for a detailed quote
Payment Terms: T/T
Name: Atomic Force Microscopes
Scanning Angle: 0~360"
Scanning Range: Maximum 100μm * 100μm * 910μm
Sample Size: Compatible with 8-inch wafers and below
Multi-Function Measurement: EFM,KFM,PFM,MFM
Scan Speed: 0.1Hz-30Hz
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Wafer-Level Atomic Force Microscoperoscope

Wafer-Level Atomic Force Microscope
Product Model:

AtomMax

Product Overview:

Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations for laser alignment, probe approach, and scanning parameter adjust.ments.

Equipment Performance Specifications
ParameterSpecification
Sample SizeCompatible with 8-inch wafers and below
Scanning RangeMaximum 100μm * 100μm * 910μm
Scanning Angle0~360"
ResolutionZ-axis closed-loop resolution 0.15 nm; X/Y closed-loop resolution 0.5 nm
Scanning Probe XY Direction lmage ResolutionNot less than 32x32~4000x4000
Operating ModesContact mode, tapping mode, phase imaging mode, lift mode, multi-directional scanning mode
Multi-Function MeasurementEFM,KFM,PFM,MFM

Application Cases

  • Potential of the Au-Ti strip electrode sheet
  • Scanning mode: KPFM (lift-mode)
  • Scanning range: 18μm * 18μmTitanium Film - Aluminum Titanate Film

  • Electrostatic force of the Au-Ti strip electrode sheet
  • Scanning mode: EFM (lift mode)
  • Scanning range: 18μm * 18μm

  • Magnetic domains in Fe-Ni thin films
  • Scanning mode: MFM (lift-mode)
  • Scanning range: 14μm * 14μm

  • PbTiO3-piezoelectric corresponding vertical amplitude image
  • Scanning mode: PFM (contact-mode)
  • Scanning range: 20μm * 20μm
Co/Pt Thin Film
  • Co/Pt Thin Film
  • Scanning Mode: Magnetic Force Microscopy (MFM)
  • Scanning Range: 25 μm * 25 μm
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